| dc.contributor.author |
Kumar, Pardeep |
|
| dc.contributor.author |
Srinivasan, Babji |
|
| dc.contributor.author |
Mohapatra, Nihar Ranjan |
|
| dc.contributor.other |
SISPAD 2015 |
|
| dc.coverage.spatial |
US |
|
| dc.date.accessioned |
2015-07-21T13:16:48Z |
|
| dc.date.available |
2015-07-21T13:16:48Z |
|
| dc.date.issued |
2015-09 |
|
| dc.identifier.citation |
Kumar, Pardeep; Srinivasan, Babji and Mohapatra, Nihar Ranjan,"Lithography process model building using locally linear embedding", in the SISPAD 2015, University of Maryland, Washington DC, US, Sep. 9-11, 2015. |
en_US |
| dc.identifier.uri |
https://repository.iitgn.ac.in/handle/123456789/1819 |
|
| dc.description.statementofresponsibility |
by Pardeep Kumar, Babji Srinivasan and Nihar Ranjan Mohapatra |
|
| dc.language.iso |
en |
en_US |
| dc.publisher |
University of Maryland, Washington |
en_US |
| dc.subject |
Lithography process model |
en_US |
| dc.subject |
linear embedding |
en_US |
| dc.title |
Lithography process model building using locally linear embedding |
en_US |
| dc.type |
Presentation |
en_US |