Modeling and optimization techniques for efficient lithography simulation

dc.contributor.advisor	Srinivasan, Babji
dc.contributor.advisor	Mohapatra, Nihar Ranjan
dc.contributor.author	Kumar, Pardeep
dc.date.accessioned	2019-08-29T09:48:14Z
dc.date.available	2019-08-29T09:48:14Z
dc.date.issued	2019
dc.identifier.citation	Kumar, pardeep (2019). Modeling and optimization techniques for efficient lithography simulation. Gandhinagar: Indian Institute of Technology Gandhinagar, 142p. (Acc. No.: T00507).
dc.identifier.uri	https://repository.iitgn.ac.in/handle/123456789/4753
dc.description.statementofresponsibility	by Pardeep Kumar
dc.format.extent	xix, 142p.: ill.; 30 cm.
dc.language.iso	en_US
dc.publisher	Indian Institute of Technology Gandhinagar
dc.subject	12310006
dc.subject	Electrical Engineering
dc.subject	Principal Component Analysis
dc.subject	Discrete Cosine Transform
dc.subject	Optical Proximity Correction
dc.subject	Lithography Simulation
dc.title	Modeling and optimization techniques for efficient lithography simulation
dc.type	Thesis
dc.contributor.department	Electrical Engineering
dc.description.degree	Ph.D.