Hotspot detection in lithographic patterns using machine learning technique

dc.contributor.advisor	Mohapatra, Nihar Ranjan
dc.contributor.advisor	Srinivasan, Babji
dc.contributor.author	Dawar, Rohit
dc.date.accessioned	2012-10-10T13:33:14Z
dc.date.available	2012-10-10T13:33:14Z
dc.date.issued	2018
dc.identifier.citation	Dewar, Rohit (2018). Hotspot detection in lithnographic patterns using machine learning techniques. Gandhinagar: Indian Institute of Technology Gandhinagar, 69p. (Acc. No.: T00348).
dc.identifier.uri	https://repository.iitgn.ac.in/handle/123456789/6864
dc.description.statementofresponsibility	by Rohit Dawar
dc.format.extent	ix, 69p
dc.language.iso	en_US
dc.publisher	Indian Institute of Technology Gandhinagar
dc.subject	16210077
dc.subject	Semiconductor Industry
dc.subject	Resolution Enhancement Techniques
dc.subject	Aerial Image Intensity
dc.subject	Lithography Simulators
dc.subject	Geometrical Parameters
dc.title	Hotspot detection in lithographic patterns using machine learning technique
dc.type	Thesis
dc.contributor.department	Electrical Engineering
dc.description.degree	M.Tech